Semiconductor structures of Schottky devices are provided. An N-type well region and a P-type well region are formed over a P-type semiconductor substrate. A first active region is formed over the P-type well region, and includes a plurality of first fins. A second active region is formed over the N-type well region, and includes a plurality of second fins. A third active region is formed over the N-type well region, and includes a plurality of third fins. A plurality of electrodes are formed over the third active region. The electrodes, the first source/drain features and the second source/drain features are formed in the same level. An emitter region of a Schottky BJT is formed by the electrodes, a base region of the Schottky BJT is formed by the N-type well region, and a collector region of the Schottky BJT is formed by the P-type semiconductor substrate.