Invention Publication
- Patent Title: SEMICONDUCTOR LASER DIODE ARRAY AND THE METHOD FOR MANUFACTURING A TWO-DIMENSIONAL SEMICONDUCTOR LASER DIODE ARRAY
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Application No.: US18282804Application Date: 2022-03-21
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Publication No.: US20240178638A1Publication Date: 2024-05-30
- Inventor: Anna KAFAR , Krzysztof GIBASIEWICZ , Jacek KACPERSKI , Kiran SABA , Szymon STANCZYK , Piotr PERLIN
- Applicant: Topgan Sp. z o.o. , Instytut Wysokich Cisnien Polskiej Akademii Nauk
- Applicant Address: PL Warszawa
- Assignee: Topgan Sp. z o.o.,Instytut Wysokich Cisnien Polskiej Akademii Nauk
- Current Assignee: Topgan Sp. z o.o.,Instytut Wysokich Cisnien Polskiej Akademii Nauk
- Current Assignee Address: PL Warszawa; PL Warszawa
- Priority: PL 437357 2021.03.19
- International Application: PCT/PL2022/050016 2022.03.21
- Date entered country: 2023-09-19
- Main IPC: H01S5/42
- IPC: H01S5/42 ; H01S5/02 ; H01S5/02255 ; H01S5/20 ; H01S5/34 ; H01S5/343 ; H01S5/40

Abstract:
The invention relates to a method for manufacturing a two-dimensional laser diode array comprising preparing a structured gallium nitride bulk substrate, a lower cladding layer, a lower light guide layer, a light-emitting layer, electron blocking layers, an upper light guide layer, an upper cladding layer, a subcontact layer, and includes forming, in GaN substrate (1) with thickness of at least 200 μm, light beam deflectors (15) by applying photoresist on the GaN substrate (1), irradiating it, developing it, and subsequently etching the applied layer in order to obtain the light beam deflectors (15). The invention relates also to a two-dimensional laser diode array manufactured using the method according to the invention.
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