Invention Publication
- Patent Title: LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION
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Application No.: US18431579Application Date: 2024-02-02
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Publication No.: US20240179828A1Publication Date: 2024-05-30
- Inventor: David T. BLAHNIK , Charles T. CARLSON , Robert B. VOPAT , Frank SINCLAIR , Paul J. MURPHY , Krag R. SENIOR
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H05H7/22
- IPC: H05H7/22
Abstract:
Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.
Public/Granted literature
- US12279359B2 Linear accelerator assembly including flexible high-voltage connection Public/Granted day:2025-04-15
Information query
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