Invention Publication
- Patent Title: SEMICONDUCTOR FILM THICKNESS PREDICTION USING MACHINE-LEARNING
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Application No.: US18075216Application Date: 2022-12-05
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Publication No.: US20240185058A1Publication Date: 2024-06-06
- Inventor: Nojan Motamedi , Dominic J. Benvegnu , Kiran L. Shrestha
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G06N3/08
- IPC: G06N3/08

Abstract:
A machine-learning model may be used to estimate a film thickness from a spectral image captured from a semiconductor substrate during processing. Instead of using actual measurements from physical substrates to train the model, simulated images may be generated for a wide variety of predefined thickness profiles. Simulated training data may be rapidly generated by receiving a film thickness profile representing a film on a semiconductor substrate design. A light source may be simulated being reflected off of the film on the semiconductor substrate and being captured by a camera. The spectral data captured by the camera may be converted into one or more images for a wafer with the film thickness profile. The images may then be labeled with thicknesses from the film thickness profile for training a machine-learning model.
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