- 专利标题: DAMAGE PREVENTION DURING WAFER EDGE TRIMMING
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申请号: US18589527申请日: 2024-02-28
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公开(公告)号: US20240198455A1公开(公告)日: 2024-06-20
- 发明人: Kuo-Ming Wu , Yung-Lung Lin , Hau-Yi Hsiao , Sheng-Chau Chen , Cheng-Yuan Tsai
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: B23K26/361
- IPC分类号: B23K26/361 ; B23K26/035 ; B23K26/062 ; H01L21/02 ; H01L21/66
摘要:
In some embodiments, the present disclosure relates to a method of trimming an annular portion of a wafer. The method includes aligning the wafer over a wafer chuck. The method uses a rotating blade having a first rotational speed to remove the annular portion from an upper surface of the wafer. While the rotating blade is removing the annular portion of the upper surface of the wafer, measuring a parameter of the wafer at a position adjacent to the rotating blade. Lastly, the method involves changing the first rotation speed of the rotating blade to a second rotational speed when the parameter is greater than a predetermined threshold.
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