Laser Machining a Transparent Workpiece

    公开(公告)号:US20250058406A1

    公开(公告)日:2025-02-20

    申请号:US18936774

    申请日:2024-11-04

    Abstract: The invention relates to a method for machining a transparent workpiece (4) by generating non-linear absorption of laser radiation in a laser beam focus located in a volume of the workpiece (4). The object of the invention is that of providing a method of improved precision and quality, and a corresponding device, for laser machining of workpieces. In particular, it is also intended for it to be possible for workpieces made of composite materials or of other special materials, such as filter glass, to be machined at an improved level of quality. For this purpose, the method according to the invention comprises the following steps: spectroscopic measurement of the linear absorption of the laser radiation in the workpiece (4), selecting a working wavelength at which the linear absorption is low, and machining the workpiece (4) by means of the application laser radiation at the working wavelength. The invention furthermore relates to a corresponding device for machining a transparent workpiece (4).

    PROCESSING APPARATUS AND PROCESSING METHOD

    公开(公告)号:US20240367266A1

    公开(公告)日:2024-11-07

    申请号:US18775234

    申请日:2024-07-17

    Abstract: A processing apparatus includes a controller configured to control an operation of forming condensing points in a processing target object. In forming the condensing points by radiating a laser light to an inside of the processing target object periodically from a modifying device while rotating the processing target object held by a holder relative to the modifying device by a rotating mechanism and, also, by moving the modifying device in a diametrical direction relative to the holder by a moving mechanism, the controller controls a number and an arrangement of the condensing points, which are simultaneously formed at different positions in a plane direction of the processing target object, based on a relative rotation number of the processing target object and a radiation pitch of the laser light.

    WORKPIECE SEPARATION DEVICE AND WORKPIECE SEPARATION METHOD

    公开(公告)号:US20230321752A1

    公开(公告)日:2023-10-12

    申请号:US18025443

    申请日:2021-01-21

    CPC classification number: B23K26/062 H01L21/6835 B23K26/032 B23K2101/40

    Abstract: A workpiece separating device for irradiating a laminated body including a workpiece having a circuit substrate bonded with a supporting body via a separating layer with a light, thereby denaturing the separating layer, and peeling the supporting body from the workpiece, the workpiece separating device comprising: a holding member for detachably holding any one of the workpiece side or the supporting body of the laminated body; a light irradiation part for irradiating the light toward the separating layer through the other of the supporting body or the workpiece side of the laminated body held by the holding member; an isolation member for, with respect to any one of the workpiece side or the supporting body of the laminated body, isolating and moving the other in the thickness direction; and a controlling part for operation controlling the light irradiation part and the isolation member.

    Method for manufacturing light-emitting element

    公开(公告)号:US11772202B2

    公开(公告)日:2023-10-03

    申请号:US17489417

    申请日:2021-09-29

    Abstract: In a method for manufacturing a light-emitting element, a second irradiation process includes forming a first modified region at a first distance from a second surface in a thickness direction of a sapphire substrate, forming a second modified region at a second distance from the second surface in the thickness direction, the second distance being less than the first distance, the second modified region being shifted in a first direction from the first modified region, and forming a third modified region at a third distance from the second surface in the thickness direction, the third distance being less than the second distance, the third modified region overlapping the first modified region in a top-view. In the thickness direction of the sapphire substrate, a greater number of modified regions that include second modified portions are formed than modified regions that include first modified portions.

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