- 专利标题: METHOD TO INDUCE STRAIN IN FINFET CHANNELS FROM AN ADJACENT REGION
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申请号: US18589774申请日: 2024-02-28
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公开(公告)号: US20240203995A1公开(公告)日: 2024-06-20
- 发明人: Pierre MORIN , Nicolas LOUBET
- 申请人: Bell Semiconductor, LLC
- 申请人地址: US PA Bethlehem
- 专利权人: Bell Semiconductor, LLC
- 当前专利权人: Bell Semiconductor, LLC
- 当前专利权人地址: US PA Bethlehem
- 分案原申请号: US14027758 2013.09.16
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L29/10 ; H01L29/16 ; H01L29/165 ; H01L29/66 ; H01L29/78
摘要:
Methods and structures for forming strained-channel finFETs are described. Fin structures for finFETs may be formed using two epitaxial layers of different lattice constants that are grown over a bulk substrate. A first thin, strained, epitaxial layer may be cut to form strain-relieved base structures for fins. The base structures may be constrained in a strained-relieved state. Fin structures may be epitaxially grown in a second layer over the base structures. The constrained base structures can cause higher amounts of strain to form in the epitaxially-grown fins than would occur for non-constrained base structures.
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