- 专利标题: VTFET CIRCUIT WITH OPTIMIZED MOL
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申请号: US18086229申请日: 2022-12-21
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公开(公告)号: US20240213252A1公开(公告)日: 2024-06-27
- 发明人: Brent A. Anderson , Albert M. Chu , Lawrence A. Clevenger , Nicholas Anthony Lanzillo , Ruilong Xie
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/118
- IPC分类号: H01L27/118 ; H03K17/693
摘要:
Integrated circuits and related logic circuits and structures employing VTFET logic devices. In particular, during middle-of-line (MOL) processing, method steps are employed for forming two-level MOL contact connector structures below first (M1) metallization level wiring formed during subsequent BEOL processing. Using damascene and subtractive metal etch techniques, respective MOL contact connector structures at two levels are formed with a second level above a first level contact. These contact connector structures at two levels below M1 metallization level can provide cross-connections to VTFET devices of logic circuits that enable increased scaling of the logic circuit designs, e.g., especially for multiplexor circuit layouts due to wiring access. The flexible MOL cross-connections made below M1 metallization level provides for much improved M1 and M2 wirability and enable semiconductor circuit layouts that allow for improved cell size reduction without creating significant connection issues at high wiring levels thereby increasing circuit design flexibility.
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