Invention Publication
- Patent Title: DMOS DEVICE HAVING JUNCTION FIELD PLATE AND MANUFACTURING METHOD THEREFOR
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Application No.: US18684175Application Date: 2022-12-20
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Publication No.: US20240222473A1Publication Date: 2024-07-04
- Inventor: Feng LIN , Chaoqi XU , Shuxian CHEN , Chunxu LI , Li LU , Siyang LIU , Weifeng SUN
- Applicant: CSMC TECHNOLOGIES FAB2 CO., LTD. , SOUTHEAST UNIVERSITY
- Applicant Address: CN Wuxi, Jiangsu
- Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.,SOUTHEAST UNIVERSITY
- Current Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.,SOUTHEAST UNIVERSITY
- Current Assignee Address: CN Wuxi, Jiangsu; CN Nanjing, Jiangsu
- Priority: CN 2111682019.5 2021.12.31
- International Application: PCT/CN2022/140340 2022.12.20
- Date entered country: 2024-02-15
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/225 ; H01L29/06 ; H01L29/417 ; H01L29/78

Abstract:
The present disclosure provides a DMOS device with a junction field plate and its manufacturing method. A drain region is located on a surface of a semiconductor substrate. A source region is located in the semiconductor substrate at a bottom of a first trench. A gate electrode is located at the bottom of the first trench. The junction field plate improves an effect on reducing surface resistance. At the same time, a depth of trenches in the DMOS device may be reduced, and thereby a depth-to-width ratio of the device is reduced, improving the feasibility of increasing a voltage resistance level. Both the source region and the drain region in the DMOS device are led out on a same surface. A second doped polycrystalline silicon layer includes a first doped sublayer and a second doped sublayer with different conduction types.
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