- 专利标题: MEMS GYROSCOPE AND ELECTRONIC PRODUCT TECHNICAL FIELD
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申请号: US18324178申请日: 2023-05-26
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公开(公告)号: US20240271932A1公开(公告)日: 2024-08-15
- 发明人: Shan Yang , Xiao Kan , Zhan Zhan , Shitao Yan , Zhao Ma , Hongtao Peng , Houming Chong , Zaixiang Pua , Kahkeen Lai , Veronica Tan , Yang Li
- 申请人: AAC Kaitai Technologies (Wuhan) CO., LTD.
- 申请人地址: CN Wuhan
- 专利权人: AAC Kaitai Technologies (Wuhan) CO., LTD.
- 当前专利权人: AAC Kaitai Technologies (Wuhan) CO., LTD.
- 当前专利权人地址: CN Wuhan
- 优先权: CN 2310131702.2 2023.02.15
- 主分类号: G01C19/00
- IPC分类号: G01C19/00 ; G01C19/574
摘要:
The present invention provides an MEMS gyroscope and an electronic product. The MEMS gyroscope comprises a plurality of first mass blocks, a second mass block and coupling parts, wherein the plurality of first mass blocks are located at two opposite sides of the second mass block in a first direction; and each coupling part comprises a coupling link and a plurality of connecting beams connected to two ends of the coupling link, the connecting beams are flexible beams, and the coupling part is positioned between the first mass blocks and the second mass block and connects the first mass blocks with the second mass block. Through the arrangement of the coupling links, strong coupling can be realized between the first mass blocks and the second mass block, so that the anti-interference performance of the MEMS gyroscope is enhanced during work and the working stability is improved.
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