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公开(公告)号：US12130139B2
公开(公告)日：2024-10-29
申请号：US17875387
申请日：2022-07-27
发明人： Zhao Ma , Zhan Zhan , Xiao Kan , Shan Yang , Shitao Yan , Hongtao Peng , Yang Li , Kahkeen Lai , Veronica Tan
IPC分类号： G01C19/5747
CPC分类号： G01C19/5747
摘要： A MEMS gyroscope for three-axis detection relates to the technical field of gyroscope and includes a substrate, a sensing unit elastically connected with the substrate, and a driving unit coupled with the sensing unit and driving the sensing unit to move. The substrate includes anchor point structures respectively located at four corners of the substrate and four coupling structures respectively elastically connected with the four anchor point structures. An avoiding space is formed between two adjacent coupling structures. The driving unit includes two driving pieces separately elastically connected with adjacent coupling structures. The two driving pieces are symmetrically arranged and are frame-shaped. The sensing unit includes four X and Y mass blocks, two Z mass blocks elastically connected with the driving pieces, and two decoupling mass blocks. The two decoupling mass blocks are elastically connected. The MEMS gyroscope is differentially driven, which realizes differential detection and reduces quadrature error.
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公开(公告)号：US20240271932A1
公开(公告)日：2024-08-15
申请号：US18324178
申请日：2023-05-26
发明人： Shan Yang , Xiao Kan , Zhan Zhan , Shitao Yan , Zhao Ma , Hongtao Peng , Houming Chong , Zaixiang Pua , Kahkeen Lai , Veronica Tan , Yang Li
IPC分类号： G01C19/00 , G01C19/574
CPC分类号： G01C19/005 , G01C19/574
摘要： The present invention provides an MEMS gyroscope and an electronic product. The MEMS gyroscope comprises a plurality of first mass blocks, a second mass block and coupling parts, wherein the plurality of first mass blocks are located at two opposite sides of the second mass block in a first direction; and each coupling part comprises a coupling link and a plurality of connecting beams connected to two ends of the coupling link, the connecting beams are flexible beams, and the coupling part is positioned between the first mass blocks and the second mass block and connects the first mass blocks with the second mass block. Through the arrangement of the coupling links, strong coupling can be realized between the first mass blocks and the second mass block, so that the anti-interference performance of the MEMS gyroscope is enhanced during work and the working stability is improved.
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公开(公告)号：US12038282B2
公开(公告)日：2024-07-16
申请号：US17873154
申请日：2022-07-26
发明人： Shan Yang , Hongtao Peng , Zhan Zhan , Shitao Yan , Zhao Ma , Xiao Kan , Kahkeen Lai , Veronica Tan
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712
摘要： A MEMS single-axis gyroscope includes an anchor point structure, a sensing unit elastically connected with the anchor point structure, and a driving decoupling structure elastically connected with the anchor point structure and the sensing unit. The sensing unit includes a plurality of mass blocks arranged side by side and rocker connecting pieces. Each of the rocker connecting pieces is connected between corresponding two adjacent mass blocks. Connecting positions between each of the rocker connecting pieces and the corresponding two adjacent mass blocks are located on a same side of the line connecting the centers of the plurality of mass blocks. The MEMS single-axis gyroscope is able to perform differential detection, which resists interference of external electrical and mechanical noise, and improves a signal-to-noise ratio. By adjusting the rocker connecting pieces arranged between each two adjacent mass blocks, a total vector displacement of the plurality of mass blocks is zero.
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公开(公告)号：US20230228569A1
公开(公告)日：2023-07-20
申请号：US17873195
申请日：2022-07-26
发明人： Zhao Ma , Zhan Zhan , Shan Yang , Xiao Kan , Shitao Yan , Yang Li , Hongtao Peng , Kahkeen Lai , Veronica Tan , Yan Hong
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712
摘要： The invention discloses a MEMS gyroscope, including a substrate, a first unit and a second unit, and the first unit and the second unit are relatively arranged on the substrate along the first direction. The first unit is connected to the second unit through a coupling spring, and the substrate is also provided with a driving electrode and a detection electrode. The first unit includes a first weight and a second weight. The second unit includes the third weight and the fourth weight set oppositely along the second direction. The second set of coupling structures are connected to the third weight and fourth weight. Compared with the prior art, the beneficial effect of the present invention is that the MEMS gyroscope adopts a symmetrical layout, which facilitates the realization of differential detection and improves the sensitivity.
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公开(公告)号：US20240337490A1
公开(公告)日：2024-10-10
申请号：US18401223
申请日：2023-12-29
发明人： Shan Yang , Xiao Kan , Zhan Zhan , Shitao Yan , Zhao Ma , Hongtao Peng , Yang Li , Veronica Tan , Kahkeen Lai , Zaixiang Pua , Houming Chong
IPC分类号： G01C19/5705
CPC分类号： G01C19/5705
摘要： The present invention provides a dual-axis gyroscope and an electronic device. The dual-axis gyroscope comprises first mass blocks, second mass blocks, a driving unit and a detecting unit. Tightly coupled connections are formed between adjacent first mass blocks, and between adjacent second mass blocks, thus improving the accuracy of displacement ratios of the first mass blocks and the second mass blocks, and enhancing the operational accuracy and stability of the dual-axis gyroscope. Furthermore, the requirement for the machining precision of the first mass blocks and the second mass blocks is reduced, thus lowering the manufacturing cost of the dual-axis gyroscope and the electronic device.
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公开(公告)号：US20240310407A1
公开(公告)日：2024-09-19
申请号：US18337425
申请日：2023-06-19
发明人： Shitao Yan , Shan Yang , Zhan Zhan , Zhao Ma , Xiao Kan , Yang Li , Veronica Tan , Kahkeen Lai , Hongtao Peng , Houming Chong , Zaixiang Pua
IPC分类号： G01P15/125 , G01P15/08 , G01P15/18
CPC分类号： G01P15/125 , G01P15/0802 , G01P15/18
摘要： An accelerometer includes a substrate. The substrate includes anchor points. An external coupling unit is annular and is parallel to the substrate. A first torsion plate is disposed on an inner side of the external coupling unit and is connected to the anchor points. Inner coupling beams are disposed on a side, close to the anchor points, of the first torsion plate. A second torsion plate is disposed on the inner side of the external coupling unit and is connected to the anchor points, the second torsion plate is connected to the first torsion plate through two of the inner coupling beams, the second torsion plate and the first torsion plate are mutually embedded, the first torsion plate and the second torsion plate are symmetrical about a first axis of symmetry. The accelerometer reduces cross coupling reduced, and accuracy and anti-interference performance of the accelerometer are improved.
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公开(公告)号：US20240271933A1
公开(公告)日：2024-08-15
申请号：US18324186
申请日：2023-05-26
发明人： Zhao Ma , Shitao Yan , Shan Yang , Zhan Zhan , Xiao Kan , Yang Li , Veronica Tan , Kahkeen Lai
IPC分类号： G01C19/00 , G01C19/5733
CPC分类号： G01C19/005 , G01C19/5733
摘要： The present disclosure provides a micro-mechanical gyroscope and an electronic product. The micro-mechanical gyroscope includes a plurality of first mass blocks, a plurality of second mass blocks, a plurality of driving members, first connecting beams and second connecting beams. The first mass blocks are arranged to face to each other in a first direction, and the second mass blocks are arranged between the first mass blocks and arranged to face to each other in a second direction perpendicular to the first direction. In the second direction, the driving members are arranged on either sides of the first mass blocks and of the second mass blocks. Ends of the first mass blocks in the second direction are connected to driving members, respectively, through the first connecting beams, and the second mass blocks are connected to adjacent driving members, respectively, through the second connecting beams 5.
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公开(公告)号：US20240069062A1
公开(公告)日：2024-02-29
申请号：US18088823
申请日：2022-12-27
发明人： Shitao Yan , Shan Yang , Zhan Zhan , Zhao Ma , Xiao Kan , Hongtao Peng , Yang Li , Kahkeen Lai , Veronica Tan
IPC分类号： G01P15/125 , G01P15/18
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/0831
摘要： The present invention provides an accelerometer, including base, anchor points, seesaw structures elastically, and a differential detection assembly; the seesaw structures includes a first seesaw structure and a second seesaw structure which are parallel to each other and placed in reverse; the anchor points includes a first anchor point and a second anchor point; the first seesaw structure includes a first elastic member and a first mass block connected to the first elastic member; the first mass block is driven by a normal phase carrier drive signal from the first anchor point; the second seesaw structure includes a second elastic member and a second mass block connected to the second elastic member; and the second mass block is driven by a reversed phase carrier drive signal from the second anchor point. The accelerometer can effectively suppress the impact of noise of an angular acceleration of rotation.
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公开(公告)号：US20230266122A1
公开(公告)日：2023-08-24
申请号：US17879816
申请日：2022-08-03
发明人： Zhao Ma , Zhan Zhan , Shan Yang , Xiao Kan , Shitao Yan , Hongtao Peng , Yang Li , Kahkeen Lai , Veronica Tan , Yan Hong
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712
摘要： A micromechanical gyroscope and an electronic device are related. The micromechanical gyroscope includes a first movement member, a second movement member, many drive members and a detection member, the first movement member has a first center, with two ends along a second direction oscillating around the first center along a first and a third directions, the second movement member has a second center, with two ends along the first direction oscillating around the second center along the second and third directions. The drive members can drive oscillations of the first and second movement members. The detection member is located above or below the first and second movement members in the third direction, to detect moving distances of the first and second movement members along the third direction. The micromechanical gyroscope can detect angular velocities in two directions simultaneously and perform differential detection to reduce errors, thus expanding application scenarios.
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公开(公告)号：US20230213338A1
公开(公告)日：2023-07-06
申请号：US17873194
申请日：2022-07-26
发明人： Xiao Kan , Zhan Zhan , Zhao Ma , Shan Yang , Shitao Yan , Hongtao Peng , Yang Li , Kahkeen Lai , Veronica Tan , Yan Hong
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712
摘要： A MEMS gyroscope includes an anchor point, at least two driving structures connected with the anchor point; a mass group connected with the driving structures, and coupling beams connected with adjacent driving structures. The mass group includes two detecting components arranged on opposite sides of the driving structures and connected with the driving structures. Each of the detecting components includes two mass blocks arranged at intervals and detecting transducers arranged below or above the mass blocks. The mass blocks are connected with the driving structures. At least portions of the mass blocks extend to outsides of the driving structures. The mass blocks and the detecting transducers are symmetrically arranged, which is convenient for realizing differential detection. In an out-plane oscillation mode, most portions of the mass blocks sense an angular velocity. By adopting detecting transducers, electromechanical coupling coefficient of detection is effectively improved, and sensitivity and signal-to-noise ratio are improved.
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