• 专利标题: SEMICONDUCTOR DEVICE INCLUDING MEMORY CELL INCLUDING THYRISTOR AND METHOD OF MANUFACTURING THE SAME
  • 申请号: US18356162
    申请日: 2023-07-20
  • 公开(公告)号: US20240276741A1
    公开(公告)日: 2024-08-15
  • 发明人: Bo Min PARKSeung Wook RYU
  • 申请人: SK hynix Inc.
  • 申请人地址: KR Icheon-si
  • 专利权人: SK hynix Inc.
  • 当前专利权人: SK hynix Inc.
  • 当前专利权人地址: KR Icheon-si
  • 优先权: KR 20230020360 2023.02.15
  • 主分类号: H10B99/00
  • IPC分类号: H10B99/00 H01L29/74 H10B12/10
SEMICONDUCTOR DEVICE INCLUDING MEMORY CELL INCLUDING THYRISTOR AND METHOD OF MANUFACTURING THE SAME
摘要:
A semiconductor device according to an embodiment includes a substrate, first and second pillar electrodes extending along a vertical direction substantially perpendicular to a surface of the substrate, and a plurality of memory cells disposed between the first and second pillar electrodes. Each of the plurality of memory cells includes first and second shared device layers that are disposed adjacent to the first and second pillar electrodes, respectively, and extend along the vertical direction, first and second base device layers disposed between the first and second shared device layers, and a control gate electrode disposed on one of the first and second base device layers. Both first and second base device layers are disposed on a plane over the substrate and substantially parallel to the surface of the substrate.
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