- 专利标题: IMAGE SENSOR WITH TRANSISTOR HAVING HIGH RELATIVE PERMITTIVITY
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申请号: US18170030申请日: 2023-02-16
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公开(公告)号: US20240282799A1公开(公告)日: 2024-08-22
- 发明人: Chih-Kuan Yu , U-Ting Chiu , Shen-Hui Hong , Feng-Chi Hung , Jen-Cheng Liu , Dun-Nian Yaung
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; H04N25/79
摘要:
Various embodiments of the present disclosure are directed towards an image sensor including a first chip stacked with a second chip. The first chip comprises a first substrate and a photodetector disposed in the first substrate. A first transistor is disposed on the first substrate and neighbors the photodetector. A plurality of second transistors is disposed within or on the stacked first and second chips. The plurality of second transistors comprises a first readout transistor having a first readout gate electrode over a first readout gate dielectric structure. The first readout gate dielectric structure comprises a lower dielectric layer stacked with an upper dielectric structure. A relative permittivity of the upper dielectric structure is greater than a relative permittivity of the lower dielectric layer.
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