- 专利标题: THREE-DIMENSIONAL MEMORY DEVICE WITH BACKSIDE SUPPORT PILLAR STRUCTURES AND METHODS OF FORMING THE SAME
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申请号: US18442792申请日: 2024-02-15
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公开(公告)号: US20240292628A1公开(公告)日: 2024-08-29
- 发明人: Akihiro TOBIOKA
- 申请人: SANDISK TECHNOLOGIES LLC
- 申请人地址: US TX ADDISON
- 专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人地址: US TX ADDISON
- 分案原申请号: US17146866 2021.01.12
- 主分类号: H10B43/50
- IPC分类号: H10B43/50 ; H01L23/00 ; H01L23/522 ; H10B41/27 ; H10B41/50 ; H10B43/27
摘要:
A three-dimensional memory device includes alternating stacks of insulating layers and electrically conductive layers. The alternating stacks are laterally spaced apart among one another by backside isolation assemblies. At least one of the backside isolation assemblies generally extends along a first horizontal direction with lateral undulations along a second horizontal direction that is perpendicular to the first horizontal direction. At least one of the alternating stacks has a modulation in width along the second horizontal direction as a function of a position along the first horizontal direction. Memory stack structures vertically extend through a respective one of the alternating stacks. Each of the backside isolation assemblies includes a respective laterally alternating sequence of backside dielectric isolation walls and backside dielectric support pillar structures.
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