Invention Publication
- Patent Title: IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
-
Application No.: US18594944Application Date: 2024-03-04
-
Publication No.: US20240300805A1Publication Date: 2024-09-12
- Inventor: Ville-Pekka RYTKÖNEN , Matti LIUKKU , Anssi BLOMQVIST
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-shi
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo-shi
- Priority: EP 160328.3 2023.03.07
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G01P15/08 ; G01P15/125

Abstract:
A microelectromechanical accelerometer is provided that includes one or more proof masses. The accelerometer also includes four sets of stator combs that form a set of four measurement capacitors together with rotor combs. Some rotor combs have a positive offset in a direction in the device plane in relation to stator, while others have a negative offset. Some rotor combs have a negative offset in a direction perpendicular to the device plane in relation to stator combs. Moreover, some stator combs have a negative offset in the direction perpendicular to the device plane in relation to rotor combs.
Information query