发明公开
- 专利标题： FILM FORMATION METHOD
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申请号： US18603541申请日： 2024-03-13
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公开(公告)号： US20240309556A1公开(公告)日： 2024-09-19
- 发明人: Makoto SHIMIZU , Hiroshi SHIHO , Hiroyuki ANDO , Naoyuki TSUKAMOTO , Yuji KATO
- 申请人： FLOSFIA INC.
- 申请人地址： JP Kyoto
- 专利权人： FLOSFIA INC.
- 当前专利权人： FLOSFIA INC.
- 当前专利权人地址： JP Kyoto
- 优先权： JP 23039132 2023.03.13
- 主分类号： C30B29/54
- IPC分类号： C30B29/54 ; C30B25/18
摘要：
The present disclosure provides a film formation method having an excellent mass productivity.
In the film formation method, at least one of a metal complex having two or more different ligands, and a metal complex having same ligands and substituents is used.
In the film formation method, at least one of a metal complex having two or more different ligands, and a metal complex having same ligands and substituents is used.
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