Invention Publication
- Patent Title: APPARATUS AND METHOD FOR MANUFACTURING DISPLAY DEVICE, AND MASK ASSEMBLY
-
Application No.: US18480544Application Date: 2023-10-04
-
Publication No.: US20240324435A1Publication Date: 2024-09-26
- Inventor: Jeongkuk Kim , Sungsoon Im , Wonje Cho
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Priority: KR 20230038981 2023.03.24 KR 20230052821 2023.04.21
- Main IPC: H10K71/20
- IPC: H10K71/20 ; G03F7/00 ; G09G3/3233 ; H10K59/12

Abstract:
An apparatus for manufacturing a display device includes a mask assembly arranged inside a chamber and facing a display substrate, a magnetic force portion arranged inside the chamber and applying a magnetic force to the mask assembly, and a deposition source which is arranged inside the chamber, faces the mask assembly, and supplies a deposition material that passes through the mask assembly and is deposited on the display substrate. The mask assembly includes a first mask layer including a first mask opening, and a second mask layer disposed on the first mask layer. The second mask layer includes a metal layer including a metal opening corresponding to the first mask opening, and an inorganic layer including an inorganic opening corresponding to the first mask opening and the metal opening. In a plan view, a width of the metal opening is greater than a width of the inorganic opening.
Information query