Invention Publication
- Patent Title: PROCESSING APPARATUS
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Application No.: US18633928Application Date: 2024-04-12
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Publication No.: US20240347321A1Publication Date: 2024-10-17
- Inventor: Tamihiro KOBAYASHI , Toshifumi KITAHARA
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Priority: JP 23066351 2023.04.14
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A processing apparatus includes a processing container, a main body constituting a lower portion of the processing container, and a lid constituting an upper portion of the processing container, wherein the lid includes a shower plate, a plate portion provided above the shower plate, and a connecting member for connecting the shower plate to the plate portion, a guide groove arranged to face the shower plate is provided in a lower surface of the plate portion, a protruding portion of the connecting member is accommodated in the guide groove, a position of the shower plate with respect to the plate portion is determined by accommodating the protruding portion in a first end of the guide groove, and in a state in which the protruding portion is accommodated in the first end and the lid is separated from the main body, the shower plate is suspended from the plate portion.
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