Invention Publication
- Patent Title: Balanced RF Resonant Antenna System
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Application No.: US18308877Application Date: 2023-04-28
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Publication No.: US20240363310A1Publication Date: 2024-10-31
- Inventor: Qiang Wang , Michael Hummel , Peter Lowell George Ventzek , Shyam Sridhar , Mitsunori Ohata
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01Q5/10

Abstract:
According to an embodiment, a plasma processing system includes a plasma chamber, an RF source, a matching circuit, a balun, and a resonating antenna. The resonating antenna includes a first and a second spiral resonant antenna (SRA), each having an electrical length corresponding to a quarter of a wavelength of a frequency of a forward RF wave generated by the RF source. The first end of the first SRA is coupled to a first balanced terminal of the balun and the second end of the first SRA is open circuit. The first end of the second SRA is coupled to a second balanced terminal of the balun and the second end of the second SRA is open circuit. The first and the second SRA are arranged in a symmetrically nested configuration having a same center point.
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