Invention Application
- Patent Title: METHOD FOR SCALABLE FABRICATION OF ULTRAFLAT POLYCRYSTALLINE DIAMOND MEMBRANES
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Application No.: US18664042Application Date: 2024-05-14
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Publication No.: US20240384433A1Publication Date: 2024-11-21
- Inventor: Zhiqin CHU , Jixiang Jing , Qi WANG , Zhongqiang WANG , Kwai Hei LI
- Applicant: The University of Hong Kong , Dongguan Institute of Opto-electronics, Peking University , Southern University of Science and Technology
- Applicant Address: CN Hong Kong; CN Dongguan; CN Shenzhen
- Assignee: The University of Hong Kong,Dongguan Institute of Opto-electronics, Peking University,Southern University of Science and Technology
- Current Assignee: The University of Hong Kong,Dongguan Institute of Opto-electronics, Peking University,Southern University of Science and Technology
- Current Assignee Address: CN Hong Kong; CN Dongguan; CN Shenzhen
- Priority: CN202310540694.7 20230515
- Main IPC: C30B28/14
- IPC: C30B28/14 ; C30B29/04 ; C30B29/64 ; C30B33/12 ; C30B35/00
Abstract:
The present invention provides a method for scalable fabrication of ultra-flat polycrystalline diamond membranes, the method comprising: (1) performing chemical vapor deposition on a growth substrate having diamond seeds thereon to grow a polycrystalline diamond membrane, wherein an exposed surface of the polycrystalline diamond membrane is a grown surface having a first roughness; and a surface bonded to the growth substrate is a buried surface; (2) bonding the grown surface to a transfer substrate using an adhesive; and (3) removing the growth substrate to expose the buried surface of the polycrystalline diamond membrane, wherein the buried surface has a second roughness after exposure, and the second roughness is less than the first roughness.
Information query
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