Invention Application
- Patent Title: COMPOSITION FOR REMOVING EDGE BEADS FROM METAL-CONTAINING RESISTS, DEVELOPER COMPOSITION OF METAL-CONTAINING RESISTS, AND METHOD OF FORMING PATTERNS USING THE COMPOSITION
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Application No.: US18627133Application Date: 2024-04-04
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Publication No.: US20240393698A1Publication Date: 2024-11-28
- Inventor: Si-Kyun PARK , Minsoo KIM , Jin-Hee BAE , Hyungrang MOON , Taeksoo KWAK , Jongpil HO , Dong Wan RYU , Ahra CHO , Myoungsoo SONG , Gyeonghun PARK , Jin Hee CHOI
- Applicant: SAMSUNG SDI CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG SDI CO., LTD.
- Current Assignee: SAMSUNG SDI CO., LTD.
- Current Assignee Address: KR Yongin-si
- Priority: KR10-2023-0066536 20230523
- Main IPC: G03F7/32
- IPC: G03F7/32 ; G03F7/004 ; G03F7/16

Abstract:
A composition configured for removing edge beads from metal-containing resists and/or as a developer composition of metal-containing resists is water-free and includes an organic solvent and at least one additive selected from among an amino acid-based compound, a sulfur-containing acid compound, and a sulfur-containing amine-based compound. A method of forming patterns using the composition includes coating a metal-containing resist composition on a substrate; coating the composition configured for removing edge beads from metal-containing resists of the present embodiments along edges of the substrate; drying and heating to form a metal-containing resist film on the substrate; exposing the metal-containing photoresist film; and developing the metal-containing resist film with the developer composition of metal-containing resists.
Information query
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