Invention Application
- Patent Title: SYSTEMS AND METHODS FOR MANAGING SEISMIC FORCES
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Application No.: US18412310Application Date: 2024-01-12
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Publication No.: US20240404857A1Publication Date: 2024-12-05
- Inventor: Chen-Hao LIAO , Pei-Yu LEE , Chih-Tsung LEE , Cheng-Lung WU , Jiun-Rong PAI
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/324 ; H01L21/673
Abstract:
Base plates of a substrate retainer transportation mechanism are provided with damping members to assist elastic members in damping and limiting movement of the substrate retainer transportation mechanism when the substrate transportation mechanism is subjected to unwanted external forces, e.g., seismic forces. By damping and limiting movement of the substrate retainer transportation mechanism, undesirable damage to substrates contained in a substrate retainer being carried by the substrate retainer transport mechanism can be minimized.
Information query
IPC分类:
