Invention Application
- Patent Title: PLASMA DIAGNOSTIC DEVICE, AND SEMICONDUCTOR PROCESSING EQUIPMENT USING THE SAME
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Application No.: US18636099Application Date: 2024-04-15
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Publication No.: US20250046587A1Publication Date: 2025-02-06
- Inventor: Taehyun Kim , Chansoo Kang , Minju Kim , Daewon Kang , Dougyong Sung , Jungmo Yang , Sejin Oh
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2023-0101478 20230803
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/67

Abstract:
The present disclosure relates to plasma diagnostic devices. An example plasma diagnostic device includes a pinhole through which a first optical signal passes, an optical device in which the first optical signal is incident and the first optical signal is converted into a second optical signal, a filter configured to filter the second optical signal and to output a third optical signal of a specific wavelength band, and a sensor configured to monitor a distribution of the first optical signal, the second optical signal, and the third optical signal.
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