Invention Application
- Patent Title: GYROSCOPES WITH ELECTRODES FOR TUNING CROSS-AXIS SENSITIVITY
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Application No.: US18944411Application Date: 2024-11-12
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Publication No.: US20250164246A1Publication Date: 2025-05-22
- Inventor: Tyler Dunn , Gaurav Vohra , William Clark , Xin Zhang , Carey Merritt
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Wilmington
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Wilmington
- Main IPC: G01C19/5712
- IPC: G01C19/5712

Abstract:
Gyroscopes with electrodes for tuning cross-axis sensitivity are disclosed. In certain embodiments, a MEMS gyroscope includes a resonator mass that moves in a first direction (for instance, x-direction), a sensing structure that detects a Coriolis effect in a second direction (for instance, y-direction), and a plurality of electrodes that control a cross-axis stiffness of the MEMS gyroscope by controlling motion of the resonator mass in a third direction (for instance, z-direction). For example, the electrodes can be used to reduce or eliminate cross-axis sensitivity arising from cross-axis stiffnesses, such as kxz (resonator-to-orthogonal) and/or kyz (Coriolis-to-orthogonal).
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