GYROSCOPES WITH ELECTRODES FOR TUNING CROSS-AXIS SENSITIVITY
Abstract:
Gyroscopes with electrodes for tuning cross-axis sensitivity are disclosed. In certain embodiments, a MEMS gyroscope includes a resonator mass that moves in a first direction (for instance, x-direction), a sensing structure that detects a Coriolis effect in a second direction (for instance, y-direction), and a plurality of electrodes that control a cross-axis stiffness of the MEMS gyroscope by controlling motion of the resonator mass in a third direction (for instance, z-direction). For example, the electrodes can be used to reduce or eliminate cross-axis sensitivity arising from cross-axis stiffnesses, such as kxz (resonator-to-orthogonal) and/or kyz (Coriolis-to-orthogonal).
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