公开(公告)号：US20250164246A1

公开(公告)日：2025-05-22

申请号：US18944411

申请日：2024-11-12

Applicant: Analog Devices, Inc.

Inventor： Tyler Dunn ,  Gaurav Vohra ,  William Clark ,  Xin Zhang ,  Carey Merritt

IPC: G01C19/5712

Abstract: Gyroscopes with electrodes for tuning cross-axis sensitivity are disclosed. In certain embodiments, a MEMS gyroscope includes a resonator mass that moves in a first direction (for instance, x-direction), a sensing structure that detects a Coriolis effect in a second direction (for instance, y-direction), and a plurality of electrodes that control a cross-axis stiffness of the MEMS gyroscope by controlling motion of the resonator mass in a third direction (for instance, z-direction). For example, the electrodes can be used to reduce or eliminate cross-axis sensitivity arising from cross-axis stiffnesses, such as kxz (resonator-to-orthogonal) and/or kyz (Coriolis-to-orthogonal).