发明授权
- 专利标题： Detector system for a scanning electron microscope
- 专利标题（中）： 用于扫描电子显微镜的检测器系统
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申请号： US3626184D申请日： 1970-03-05
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公开(公告)号： US3626184A公开(公告)日： 1971-12-07
- 发明人: CREWE ALBERT V
- 申请人： ATOMIC ENERGY COMMISSION
- 专利权人： Atomic Energy Commission
- 当前专利权人： Atomic Energy Commission
- 优先权： US1680270 1970-03-05
- 主分类号： H01J37/04
- IPC分类号： H01J37/04 ; H01J37/05 ; H01J37/22 ; H01J37/244 ; H01J37/28 ; H01J49/48
摘要：
In an electron microscope transmitted electrons are detected according to whether they are unscattered, elastically scattered or inelastically scattered by the specimen. The elastically scattered electrons are further separated according to the magnitude of the scattering. Signals from the separate detectors can be used separately or combined as desired to enhance the information obtained from a specimen.
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