发明授权
US3956023A Process for making a deep power diode by thermal migration of dopant
失效
通过掺杂剂的热迁移制造深度功率二极管的工艺
- 专利标题: Process for making a deep power diode by thermal migration of dopant
- 专利标题(中): 通过掺杂剂的热迁移制造深度功率二极管的工艺
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申请号: US519249申请日: 1974-10-30
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公开(公告)号: US3956023A公开(公告)日: 1976-05-11
- 发明人: Harvey E. Cline , Thomas R. Anthony
- 申请人: Harvey E. Cline , Thomas R. Anthony
- 申请人地址: NY Schenectady
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 当前专利权人地址: NY Schenectady
- 主分类号: H01L21/18
- IPC分类号: H01L21/18 ; H01L21/24 ; H01L29/00 ; H01L7/36
摘要:
A semiconductor diode comprises a first body of semiconductor material having a selected resistivity and a first type conductivity and a region of second type conductivity and a selected resistivity. The second body consists of recrystallized semiconductor material of a layer thereof having solid solubility of a dopant therein and has the same crystallographic structure as the first body. The second region is formed by a temperature gradient zone melting process embodying the migration of a metal-enriched melt of semiconductor material through the second body of semiconductor material. Preferably, the metal-enriched melt is no greater than approximately 20 microns in thickness. The second body initially has a axial crystallographic orientation when it is a wafer. However, the second body initially may be polycrystalline semiconductor material.
公开/授权文献
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