发明授权
- 专利标题： Silicon photosensor with optical thin film filter
- 专利标题（中）： 硅光电传感器与光学薄膜滤光片
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申请号： US563934申请日： 1975-03-31
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公开(公告)号： US3996461A公开(公告)日： 1976-12-07
- 发明人: Frank C. Sulzbach , Joseph B. Horak
- 申请人： Frank C. Sulzbach , Joseph B. Horak
- 申请人地址： TX Dallas
- 专利权人： Texas Instruments Incorporated
- 当前专利权人： Texas Instruments Incorporated
- 当前专利权人地址： TX Dallas
- 主分类号： H01L31/0216
- IPC分类号： H01L31/0216 ; H01J39/12
摘要：
Disclosed is silicon photodiode having a multilayer thin film optical filter deposited directly on the detecting surface thereof. The multilayer filter is an interference type filter designed to limit the normal response of a silicon photodiode so that its spectral response is essentially the same as that of the human eye. The multilayer filter is applied to the diode during fabrication using low cost mass production techniques. The multilayer filter materials are very durable and provide excellent passivation and environmental protection for the diode surface.
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