Invention Grant
- Patent Title: Solid state force transducer and method of making same
- Patent Title (中): 固态力传感器及其制作方法
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Application No.: US656632Application Date: 1976-02-09
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Publication No.: US4071838APublication Date: 1978-01-31
- Inventor: Barry Block
- Applicant: Barry Block
- Applicant Address: CA Los Altos Hills
- Assignee: Diax Corporation
- Current Assignee: Diax Corporation
- Current Assignee Address: CA Los Altos Hills
- Main IPC: H01L29/84
- IPC: H01L29/84 ; G01P15/08 ; G01P15/12 ; H01L41/02 ; H04R23/00
Abstract:
Solid state folded leaf spring force transducers are fabricated by batch photolithographic and etching techniques from a monocrystalline material, such as silicon. The folded leaf spring structure includes elongated gaps separating adjacent leaf spring leg portions, such elongated gaps being oriented parallel to a crystallographic axis of the monocrystalline material. In a preferred embodiment the monocrystalline material is of diamond cubic type and the leaf spring gaps extend in mutually orthogonal directions parallel to the and crystallographic axes, respectively. In a preferred method of fabricating the spring structure, the structure is etched from a monocrystalline wafer by means of an anisotropic etchant so as to more precisely define angles and dimensions of the resultant spring structure. In one embodiment, the gaps between adjacent leg portions of the spring structure are sealed in a fluid tight manner by means of oxide membranes left intact upon etching of the spring structure. In an accelerometer embodiment, sensing masses of equal weight are affixed to opposite sides of the spring structure for dynamically balancing same.
Public/Granted literature
- US6066295A System and method for remote detection and remediation of airborne and waterborne chemical/biological agents Public/Granted day:2000-05-23
Information query
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