Dual focus lens with extended depth of focus
    2.
    发明授权
    Dual focus lens with extended depth of focus 失效
    双焦距镜头,具有更高的焦距

    公开(公告)号:US06330118B1

    公开(公告)日:2001-12-11

    申请号:US09288269

    申请日:1999-04-08

    Abstract: A magneto optic or optical disk drive comprises a laser source for providing laser beam, and a lens or compound lens for focussing the laser onto a currently inserted recording disk with specific overcoat thickness. In one embodiment, the lens is a compound lens that can focus aberration-free spots on different types of disk media having recording layers located under overcoats of different thicknesses. When a specific disk is inserted, only one spot in focussed onto the current recording layer. Furthermore, if the disk spins rapidly, it can wobble. The lens or compound lens comprises different regions where the focal length may vary slightly and continuously or discretely. Because of this, as the disk wobbles, the lens can nonetheless continue to focus laser light onto a small spot on the recording media, providing increased depth of focus in the vicinity of the currently inserted recording media. Furthermore, the increased depth of focus will also remedy problems related to the change in focal length of the lens with changes in wavelength of the laser source. Because some of these changes in wavelength occur abruptly, this is also a case in which the limited performance of the auto-focus tracking system would be overly burdened.

    Abstract translation: 磁光盘或光盘驱动器包括用于提供激光束的激光源和用于将激光聚焦到具有特定外涂层厚度的当前插入的记录盘上的透镜或复合透镜。 在一个实施例中,透镜是可以将像差自由点聚焦在具有位于不同厚度的外涂层下的记录层的不同类型的盘介质上的复合透镜。 当插入特定盘时,只有一个点集中在当前记录层上。 此外,如果磁盘快速旋转,则可能会摆动。 透镜或复合透镜包括不同的区域,其中焦距可以稍微和连续地或离散地变化。 正因为如此,随着磁盘的摆动,透镜可以继续将激光聚焦到记录介质上的一个小点上,从而在当前插入的记录介质附近提供增加的焦点深度。 此外,增加的焦深也将补救与激光源的波长变化相关的透镜焦距变化的问题。 因为这些波长的一些变化突然发生,所以这也是自动对焦跟踪系统的有限性能过度负担的情况。

    Chemical etching of a semiconductive wafer by undercutting an etch
stopped layer
    3.
    发明授权
    Chemical etching of a semiconductive wafer by undercutting an etch stopped layer 失效
    通过底切蚀刻停止层对半导体晶片进行化学蚀刻

    公开(公告)号:US4597003A

    公开(公告)日:1986-06-24

    申请号:US556832

    申请日:1983-12-01

    CPC classification number: H01L21/3086 H01L21/30608 H01L21/3081 Y10T29/49103

    Abstract: Three dimensional single crystalline structures, such as folded cantilever beams supported from a frame and supporting a central structure free to move relative to the frame, are fabricated by anisotropically etching through openings in etch stop layers on opposite sides of the substrate wafer. The openings are patterned and aligned so that the etch stop layers are undercut to define etch stop portions interconnected by unetched substrate material.

    Abstract translation: 通过各向异性蚀刻穿过衬底晶片的相对侧上的蚀刻停止层中的开口,制造三维单晶结构,例如从框架支撑并支撑相对于框架自由移动的中心结构的折叠悬臂梁。 开口被图案化和对准,使得蚀刻停止层被底切以限定通过未蚀刻的衬底材料互连的蚀刻停止部分。

    Gray scale mask and depth pattern transfer technique using inorganic
chalcogenide glass
    5.
    发明授权
    Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass 失效
    使用无机硫族化物玻璃的灰度掩模和深度图案转移技术

    公开(公告)号:US5998066A

    公开(公告)日:1999-12-07

    申请号:US857324

    申请日:1997-05-16

    Abstract: A method of producing a high resolution expanded analog gray scale mask is described. Using an inorganic chalcogenide glass, such as a selenium germanium, coated with a thin layer of silver, a gray scale mask may be produced with accurate control of the size, uniformity and variance of the pixels. The selenium germanium glass is composed of column structures arranged perpendicularly to the substrate giving a possible edge precision of 100 .ANG.. The column structures also prevent undercutting during the etching process, thus permitting pixels to be placed close together. Accordingly, selenium germanium may be used as a high resolution gray scale mask with an expanded analog gray scale. The gray scale mask may be used to impress information as a modulated thickness on a selenium germanium photoresist film on an inorganic substrate. The selenium germanium photoresist film may then transfer the gray scale to the substrate.

    Abstract translation: 描述了一种制造高分辨率扩展模拟灰度掩模的方法。 使用涂覆有薄银层的无机硫族化物玻璃(例如硒锗)可以通过精确控制像素的尺寸,均匀性和方差来生产灰度掩模。 硒锗玻璃由垂直于衬底排列的柱结构组成,给出了100 ANGSTROM的边缘精度。 柱结构还防止在蚀刻工艺期间的底切,从而允许像素靠近放置在一起。 因此,硒锗可以用作具有扩展的模拟灰度级的高分辨率灰度级掩模。 灰度掩模可用于将信息作为调制厚度印在无机基板上的硒锗光致抗蚀剂膜上。 然后硒锗光致抗蚀剂膜可以将灰度级转移到衬底。

    Solid state transducer and method of making same
    6.
    发明授权
    Solid state transducer and method of making same 失效
    固态传感器及其制作方法

    公开(公告)号:US4783237A

    公开(公告)日:1988-11-08

    申请号:US873854

    申请日:1986-06-11

    CPC classification number: G01P15/0802 G01P2015/0828 Y10S438/97

    Abstract: Folded cantilever structures and solid state force transducers using same are made by chemical etching of a semiconductive wafer. In the chemical etching process, an etch stop layer is provided on a wafer of semiconductive material. The etch stop layer is opened in a certain pre-determined pattern and etchant is introduced through the opening in the etch stop layer to produce substantial undercut etching of portions of the etch stop layer. The opening is patterned to define a support structure (frame) for the folded cantilever portion which is undercut. The etch is terminated such that one end of the undercut folded cantilever structure is supported from the frame and the other end terminates on a structure such as a mass that is supported from the frame by means of the folded cantilever structure.

    Abstract translation: 通过化学蚀刻半导体晶片制造折叠的悬臂结构和使用它们的固态力传感器。 在化学蚀刻工艺中,在半导体材料的晶片上提供蚀刻停止层。 蚀刻停止层以特定的预定图案打开,并且蚀刻剂通过蚀刻停止层中的开口引入,以对蚀刻停止层的部分产生大量的底切蚀刻。 将开口图案化以限定用于底切的折叠悬臂部分的支撑结构(框架)。 蚀刻被终止,使得底切折叠的悬臂结构的一端从框架支撑,另一端终止于诸如通过折叠的悬臂结构从框架支撑的质量的结构上。

    Method of undercut anisotropic etching of semiconductor material
    7.
    发明授权
    Method of undercut anisotropic etching of semiconductor material 失效
    半导体材料的底切各向异性蚀刻方法

    公开(公告)号:US4600934A

    公开(公告)日:1986-07-15

    申请号:US573693

    申请日:1984-01-25

    Abstract: An etch stopped layer portion overlying a (100) or (110) major face of a diamond cubic semiconductor material is undercut anisotropically etched by orienting a side edge of the etch stopped layer portion which is to be undercut, at an angle to the most nearly parallel {111} trace on the (100) or (110) face. The etch time is further reduced by slotting through the etch stopped layer with slots oriented at an angle to the {111} traces on the underlying (100) or (110) face. Undercut bridge structures are formed by undercutting quadrilateral etch stopped layer portions from opposite sides of the quadrilateral or from the sides plus slots forming diagonals of {111} trace quadrilaterals having combined areas coextensive with the area to be undercut.

    Abstract translation: 覆盖金刚石立方体半导体材料的(100)或(110)主面上的蚀刻停止层部分通过将要被切削的蚀刻停止层部分的侧边缘定向成最接近 (100)或(110)面平行{111}迹线。 蚀刻时间进一步减小,通过切槽穿过蚀刻停止层,其中槽以与底层(100)或(110)面上的{111}迹线成一定角度。 底切桥结构通过从四边形或从侧面的相对侧或从侧面加上形成具有与要切削的区域共同延伸的组合区域的{111}跟踪四边形的对角线的槽形成四边形蚀刻停止层部分而形成。

    Method of making a capacitive force transducer
    8.
    发明授权
    Method of making a capacitive force transducer 失效
    制造电容式力传感器的方法

    公开(公告)号:US4360955A

    公开(公告)日:1982-11-30

    申请号:US142236

    申请日:1980-04-21

    Applicant: Barry Block

    Inventor: Barry Block

    CPC classification number: H04R19/005 H04R19/06 Y10T29/435 Y10T29/49799

    Abstract: A capacitive force transducer, particularly suited for use as a microphone or as a phonograph needle pick-up cartridge, comprises a diaphragm electrode insulatively held to a lip portion of a recess in a second electrode, thereby forming a capacitive detector. The lip structure of the second electrode structure has a capacitive face region diverging from a virtual pivot region at the lip where the diaphragm is pivotably affixed to the recessed electrode. In this manner, the quiescent capacitance is defined predominantly by the capacitance near the lip, which is relatively small and defined and the change in capacitance for a given deflection of the diaphragm is relatively large, thereby improving the sensitivity of the transducer. In the case of a phonographic pick-up cartridge, the pick-up needle is coupled to the diaphragm so that vibrations induced in the needle produce corresponding vibrations of the diaphragm. A batch method of fabricating the transducers comprises recessing a semiconductive wafer through a major face to define a plurality of capacitive regions around the margins of the recesses. The diaphragm is conveniently formed by a layer deposited over an insulative layer deposited on the non recessed face of the wafer. The wafer is diced to provide a batch of the transducers.

    Abstract translation: 特别适合用作麦克风或作为留声机针拾取盒的电容式力传感器包括隔离电极,绝缘地保持在第二电极中的凹部的唇部,从而形成电容式检测器。 第二电极结构的唇缘结构具有从唇部处的虚拟枢转区域发散的电容面区域,其中隔膜可枢转地固定到凹陷电极。 以这种方式,静态电容主要由边缘附近的电容限定,其相对较小并被限定,并且隔膜的给定偏转的电容变化相对较大,从而提高了换能器的灵敏度。 在拾音卡盒的情况下,拾音针被连接到隔膜,使得在针中产生的振动产生相应的隔膜振动。 制造换能器的分批方法包括通过主面凹入半导体晶片以在凹部的边缘周围限定多个电容区域。 膜片方便地由沉积在晶片的非凹面上的绝缘层上沉积的层形成。 切片晶片以提供一批换能器。

    Inlet system for a gas analyzer
    9.
    发明授权
    Inlet system for a gas analyzer 失效
    气体分析仪入口系统

    公开(公告)号:US4293316A

    公开(公告)日:1981-10-06

    申请号:US838310

    申请日:1977-09-30

    Applicant: Barry Block

    Inventor: Barry Block

    Abstract: The detector region of a gas analyzer is interfaced to a source of gas under analysis, such as the atmosphere, by means of an adsorber type preconcentrator, which preferentially adsorbs the gaseous constituent of interest, such as relatively heavy hydrocarbons, while permitting the other lighter hydrocarbons, water vapor, and permanent gases to pass thereby without appreciable adsorption. After a substantial volume of gas to be analyzed has passed through the adsorber stage, the adsorbed materials are desorbed from the surface of the adsorber into the input stage of a membrane separator. As a consequence, the partial pressure of the constituent of interest is greatly increased at the input stage of the membrane separator. The gaseous constituent of interest is then passed through the membrane separator, and further separated therein from water vapor, the permanent gases and some of the lighter hydrocarbons and then passed into the detector region of the gas analyzer. In a preferred embodiment, the output stage of the membrane separator is connected to a second adsorber concentrator so that the partial pressure at the output of the membrane separator is reduced for the gaseous constituent of interest so as to facilitate flow of the gaseous constituent of interest through the membrane separator.

    Abstract translation: 气体分析仪的检测器区域通过吸附器型预浓缩器(如吸附器类型预浓缩器)与诸如气氛的分析气体源接口,该浓缩器优先吸附相关气体成分,例如相当重的烃,同时允许其它较轻的 碳氢化合物,水蒸气和永久气体通过,从而没有明显的吸附。 在大量待分析的气体通过吸附器阶段之后,吸附材料从吸附器的表面解吸到膜分离器的输入级。 因此,在膜分离器的输入阶段,感兴趣的成分的分压大大增加。 感兴趣的气体成分然后通过膜分离器,并进一步与水蒸汽分离,永久气体和一些较轻的烃,然后进入气体分析仪的检测器区域。 在优选实施例中,膜分离器的输出级连接到第二吸附器浓缩器,使得对于感兴趣的气体成分,膜分离器的输出处的分压降低,以促进感兴趣的气体成分的流动 通过膜分离器。

    Capacitive force transducer
    10.
    发明授权
    Capacitive force transducer 失效
    电容力传感器

    公开(公告)号:US4225755A

    公开(公告)日:1980-09-30

    申请号:US903827

    申请日:1978-05-08

    Applicant: Barry Block

    Inventor: Barry Block

    CPC classification number: H04R19/06 H04R19/005

    Abstract: A capacitive force transducer, particularly suited for use as a microphone or as a phonograph needle pick-up cartridge, comprises a diaphragm electrode insulatively held to a lip portion of a recess in a second electrode, thereby forming a capacitive detector. The lip structure of the second electrode structure has a capacitive face region diverging from a virtual pivot region at the lip where the diaphragm is pivotably affixed to the recessed electrode. In this manner, the quiescent capacitance is defined predominantly by the capacitance near the lip, which is relatively small and defined and the change in capacitance for a given deflection of the diaphragm is relatively large, thereby improving the sensitivity of the transducer. In the case of a phonographic pick-up cartridge, the pick-up needle is coupled to the diaphragm so that vibrations induced in the needle produce corresponding vibrations of the diaphragm. A batch method of fabricating the transducers comprises recessing a semiconductive wafer through a major face to define a plurality of capacitive regions around the margins of the recesses. The diaphragm is conveniently formed by a layer deposited over an insulative layer deposited on the non recessed face of the wafer. The wafer is diced to provide a batch of the transducers.

    Abstract translation: 特别适合用作麦克风或作为留声机针拾取盒的电容式力传感器包括隔离电极,绝缘地保持在第二电极中的凹部的唇部,由此形成电容式检测器。 第二电极结构的唇缘结构具有从唇部处的虚拟枢转区域发散的电容面区域,其中隔膜可枢转地固定到凹陷电极。 以这种方式,静态电容主要由边缘附近的电容限定,其相对较小并被限定,并且隔膜的给定偏转的电容变化相对较大,从而提高了换能器的灵敏度。 在拾音卡盒的情况下,拾音针被连接到隔膜,使得在针中产生的振动产生相应的隔膜振动。 制造换能器的分批方法包括通过主面凹入半导体晶片以在凹部的边缘周围限定多个电容区域。 膜片方便地由沉积在晶片的非凹面上的绝缘层上沉积的层形成。 切片晶片以提供一批换能器。

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