发明授权
- 专利标题: Device for and a method of calibrating electron-optical apparatus
- 专利标题(中): 用于校准电子光学装置的装置和方法
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申请号: US771982申请日: 1977-02-25
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公开(公告)号: US4095112A公开(公告)日: 1978-06-13
- 发明人: Jacques Trotel
- 申请人: Jacques Trotel
- 申请人地址: FR Paris
- 专利权人: Thomson-CSF
- 当前专利权人: Thomson-CSF
- 当前专利权人地址: FR Paris
- 优先权: FR7402572 19740125
- 主分类号: H01J37/304
- IPC分类号: H01J37/304 ; G01N21/00 ; G21G5/00
摘要:
A device is provided for adjusting electron-optical apparatus. The specimen to be scanned is equipped with a marker emitting back-scattered electrons. A transducer, in response to these electrons, emits a signal which unblocks the modulating electrode of a cathode ray tube used for the display purpose. The tube screen has long persistance characteristics; the beam and the object holder being displaced in four mutually perpendicular directions by theoretically corresponding quantities, the adjusting errors are visible immediately.
公开/授权文献
- US4649206A Lignan compound 公开/授权日:1987-03-10
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