发明授权
US4095112A Device for and a method of calibrating electron-optical apparatus 失效
用于校准电子光学装置的装置和方法

  • 专利标题: Device for and a method of calibrating electron-optical apparatus
  • 专利标题(中): 用于校准电子光学装置的装置和方法
  • 申请号: US771982
    申请日: 1977-02-25
  • 公开(公告)号: US4095112A
    公开(公告)日: 1978-06-13
  • 发明人: Jacques Trotel
  • 申请人: Jacques Trotel
  • 申请人地址: FR Paris
  • 专利权人: Thomson-CSF
  • 当前专利权人: Thomson-CSF
  • 当前专利权人地址: FR Paris
  • 优先权: FR7402572 19740125
  • 主分类号: H01J37/304
  • IPC分类号: H01J37/304 G01N21/00 G21G5/00
Device for and a method of calibrating electron-optical apparatus
摘要:
A device is provided for adjusting electron-optical apparatus. The specimen to be scanned is equipped with a marker emitting back-scattered electrons. A transducer, in response to these electrons, emits a signal which unblocks the modulating electrode of a cathode ray tube used for the display purpose. The tube screen has long persistance characteristics; the beam and the object holder being displaced in four mutually perpendicular directions by theoretically corresponding quantities, the adjusting errors are visible immediately.
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