发明授权
- 专利标题: Gage for micromachining system
- 专利标题(中): 用于微加工系统的量具
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申请号: US861074申请日: 1977-12-14
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公开(公告)号: US4141150A公开(公告)日: 1979-02-27
- 发明人: Donald M. Miller
- 申请人: Donald M. Miller
- 申请人地址: DC Washington
- 专利权人: The United States of America as represented by the United States Department of Energy
- 当前专利权人: The United States of America as represented by the United States Department of Energy
- 当前专利权人地址: DC Washington
- 主分类号: B23Q1/28
- IPC分类号: B23Q1/28 ; B23Q1/48 ; B23Q1/70 ; B23Q17/22 ; B24B13/04 ; G01B7/00 ; G01B7/28 ; G12B13/00
摘要:
A gage for measuring the contour of the surface of an element of a micromachining tool system and of a work piece machined by the micromachining tool system. The gage comprises a glass plate containing two electrical contacts and supporting a steel ball resting against the contacts. As the element or workpiece is moved against the steel ball, the very slight contact pressure causes an extremely small movement of the steel ball which breaks the electrical circuit between the two contacts. The contour information is supplied to a dedicated computer controlling the micromachining tool so that the computer knows the contour of the element and the work piece to an accuracy of .+-. 25 nm. The micromachining tool system with X- and omega-axes is used to machine spherical, aspherical, and irregular surfaces with a maximum contour error of 100 nanometers (nm) and surface waviness of no more than 0.8 nm RMS.
公开/授权文献
- US5829570A Terminal rail system for escalator 公开/授权日:1998-11-03