发明授权
- 专利标题： Molecular beam epitaxy using premixing
- 专利标题（中）： 分子束外延使用预混合
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申请号： US869779申请日： 1978-01-16
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公开(公告)号： US4159919A公开(公告)日： 1979-07-03
- 发明人: James H. McFee , Barry I. Miller
- 申请人： James H. McFee , Barry I. Miller
- 申请人地址： NJ Murray Hill
- 专利权人： Bell Telephone Laboratories, Incorporated
- 当前专利权人： Bell Telephone Laboratories, Incorporated
- 当前专利权人地址： NJ Murray Hill
- 主分类号： C30B23/08
- IPC分类号： C30B23/08 ; C30B23/02 ; H01L21/203
摘要：
An improved method of forming ternary and quaternary epitaxial films by molecular beam epitaxy involves controlling precisely the ratio of concentrations of two alloying elements in the final compound by heating predetermined independently adjustable quantities of two or more alloying elements in the same oven.
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