发明授权
- 专利标题： Process for analyzing charged particles
- 专利标题（中）： 分析带电粒子的方法
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申请号： US878875申请日： 1978-02-17
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公开(公告)号： US4189639A公开(公告)日： 1980-02-19
- 发明人: Yoshiaki Kai , Wataru Sakurai , Fumiya Konishi
- 申请人： Yoshiaki Kai , Wataru Sakurai , Fumiya Konishi
- 申请人地址： JPX Osaka
- 专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址： JPX Osaka
- 优先权： JPX52-18531 19770221
- 主分类号： G01N27/62
- IPC分类号： G01N27/62 ; G01T1/29 ; G01T5/10 ; H01J49/02 ; H01J49/26 ; H01J39/34
摘要：
A process for analyzing charged particles wherein charged particles are impinged on a film of resist which is made of polymethylmethacrylate sensitive to charged particles, the resist film is dissolved and the mass of charged particles impinged is measured in terms of the dissolved resist or the resist left.
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