发明授权
- 专利标题: Double crucible crystal growing apparatus
- 专利标题(中): 双坩埚晶体生长装置
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申请号: US944454申请日: 1978-09-21
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公开(公告)号: US4190631A公开(公告)日: 1980-02-26
- 发明人: Thomas J. Dewees , John S. Fangman , Wen Lin
- 申请人: Thomas J. Dewees , John S. Fangman , Wen Lin
- 申请人地址: NY New York
- 专利权人: Western Electric Company, Incorporated
- 当前专利权人: Western Electric Company, Incorporated
- 当前专利权人地址: NY New York
- 主分类号: C30B15/12
- IPC分类号: C30B15/12 ; B01J17/18
摘要:
The disclosure is directed to a double crucible Czochralski crystal semiconductor growing apparatus (10). An inner crucible (14) floats in a melt within an outer crucible (13) and a single crystal semiconductor billet (23) is pulled from the melt (16) in the inner crucible. An elongated tubular member (26), having at least one small aperture (33) in the wall thereof, provides a channel between the outer and inner crucibles. The tubular member (26) permits flow of the melt in the outer crucible (14) to the inner crucible (13) while inhibiting the diffusion of dopant material from the inner to outer crucible while any gas in the member will pass through the aperture (33).
公开/授权文献
- US5982234A Low noise arrangement or an amplifier 公开/授权日:1999-11-09
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