发明授权
US4266875A Method and device for contact-free interval or thickness measurement by control of the direction of a light ray beam 失效
通过控制光线束的方向进行无接触间隔或厚度测量的方法和装置

  • 专利标题: Method and device for contact-free interval or thickness measurement by control of the direction of a light ray beam
  • 专利标题(中): 通过控制光线束的方向进行无接触间隔或厚度测量的方法和装置
  • 申请号: US118778
    申请日: 1980-02-05
  • 公开(公告)号: US4266875A
    公开(公告)日: 1981-05-12
  • 发明人: Viktor Bodlaj
  • 申请人: Viktor Bodlaj
  • 申请人地址: DEX Berlin & Munich
  • 专利权人: Siemens Aktiengesellschaft
  • 当前专利权人: Siemens Aktiengesellschaft
  • 当前专利权人地址: DEX Berlin & Munich
  • 优先权: DEX2906494 19790220
  • 主分类号: G01B11/00
  • IPC分类号: G01B11/00 G01B11/02 G01B11/06 G01S17/46 G01S9/62
Method and device for contact-free interval or thickness measurement by
control of the direction of a light ray beam
摘要:
A method and apparatus is disclosed for contact-free interval or thickness measurement. A sharply concentrated light beam is periodically deflected over a measuring space having a measuring plane and reference plane situated therein. A beam divider is positioned after the beam deflector and deflects the beam towards first, second and third light detectors. A fourth light detector is also provided to receive reflected light from the measuring plane and reference plane. A first time difference is utilized to control deflection frequency of the light beam; a second time difference controls deflection amplitude of the light beam; a third time difference determines a spacing of the measuring plane from the reference plane; and a fourth time difference corrects for changes in a direction of the light beam such as when a new light source is positioned in the system or when other directional errors occur.
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