发明授权
US4266875A Method and device for contact-free interval or thickness measurement by
control of the direction of a light ray beam
失效
通过控制光线束的方向进行无接触间隔或厚度测量的方法和装置
- 专利标题: Method and device for contact-free interval or thickness measurement by control of the direction of a light ray beam
- 专利标题(中): 通过控制光线束的方向进行无接触间隔或厚度测量的方法和装置
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申请号: US118778申请日: 1980-02-05
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公开(公告)号: US4266875A公开(公告)日: 1981-05-12
- 发明人: Viktor Bodlaj
- 申请人: Viktor Bodlaj
- 申请人地址: DEX Berlin & Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DEX Berlin & Munich
- 优先权: DEX2906494 19790220
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; G01B11/02 ; G01B11/06 ; G01S17/46 ; G01S9/62
摘要:
A method and apparatus is disclosed for contact-free interval or thickness measurement. A sharply concentrated light beam is periodically deflected over a measuring space having a measuring plane and reference plane situated therein. A beam divider is positioned after the beam deflector and deflects the beam towards first, second and third light detectors. A fourth light detector is also provided to receive reflected light from the measuring plane and reference plane. A first time difference is utilized to control deflection frequency of the light beam; a second time difference controls deflection amplitude of the light beam; a third time difference determines a spacing of the measuring plane from the reference plane; and a fourth time difference corrects for changes in a direction of the light beam such as when a new light source is positioned in the system or when other directional errors occur.
公开/授权文献
- US5038618A Measurement of distortion 公开/授权日:1991-08-13
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