发明授权
US4268584A Nickel-X/gold/nickel-X conductors for solid state devices where X is
phosphorus, boron, or carbon
失效
用于固态器件的镍/ X /金/镍-X导体,其中X是磷,硼或碳
- 专利标题: Nickel-X/gold/nickel-X conductors for solid state devices where X is phosphorus, boron, or carbon
- 专利标题(中): 用于固态器件的镍/ X /金/镍-X导体,其中X是磷,硼或碳
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申请号: US103969申请日: 1979-12-17
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公开(公告)号: US4268584A公开(公告)日: 1981-05-19
- 发明人: Kie Y. Ahn , Christopher H. Bajorek , Paul S. Ho , Robert J. Miller , John V. Powers
- 申请人: Kie Y. Ahn , Christopher H. Bajorek , Paul S. Ho , Robert J. Miller , John V. Powers
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: C23C26/00
- IPC分类号: C23C26/00 ; C23C28/00 ; G11B5/31 ; H01B1/02 ; H01F41/34 ; H01L21/3205 ; H01L23/532 ; H05K1/09 ; H05K3/38 ; B32B15/00 ; B05D5/12
摘要:
A laminated conductor includes a lower thin film of nickel-X alloy or pseudo alloy deposited upon a substrate containing silicon or upon a substrate intended for use as a magnetic bubble storage device. Upon the film of nickel-X alloy, a thicker film of gold is deposited as the conductive portion of the conductor. On the upper surface of the gold layer is deposited a thin film of nickel-X alloy. Failure of the conductor because of electromigration is reduced dramatically as compared with use of molybdenum instead of nickel in the laminated structure. The nonmagnetic nickel-X alloy does not interfere with magnetic fields or produce unwanted magnetic fields.
公开/授权文献
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