In an improved process for the production of a finely divided oxide of a metal, silicon or mixtures thereof by the hydrolytic conversion of a corresponding volatile chloride of said metal, silicon or mixtures thereof in a flame; wherein said volatile chloride or said mixture of volatile chlorides in admixture with a combustible hydrogen-containing gas and air or oxygen are fed to a flame emitting from a burner into a reaction chamber to thereby form an oxide aerosol in waste gases from said burner; cooling said oxide and said waste gases; and separating said oxide from said waste gases; wherein the improvement comprises maintaining said waste gases substantially free of chlorine by reducing chlorine that forms during said conversion in said flame with hydrogen while cooling said waste gas below the temperature at which hydrogen and oxygen react in said waste gas.