发明授权
US4315130A Method of treating object by laser beam and apparatus therefor 失效
用激光束处理物体的方法及其设备

Method of treating object by laser beam and apparatus therefor
摘要:
There are disclosed a laser treatment method and an apparatus therefor in which a laser beam is irradiated on an object to be treated. The laser beam emitted from a laser apparatus is divided into a plurality of fractional beams, and the fractional laser beams are reflected toward and irradiated on an area to be irradiated of the object being treated after being compounded such that energy density distribution on the irradiated area is made substantially uniform in at least one direction.
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