发明授权
- 专利标题: Vaporizer for vacuum deposition installations
- 专利标题(中): 蒸发器用于真空沉积设备
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申请号: US145632申请日: 1980-05-01
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公开(公告)号: US4328763A公开(公告)日: 1982-05-11
- 发明人: Peter Sommerkamp , Walter Heil
- 申请人: Peter Sommerkamp , Walter Heil
- 申请人地址: DEX Cologne
- 专利权人: Leybold-Heraeus
- 当前专利权人: Leybold-Heraeus
- 当前专利权人地址: DEX Cologne
- 优先权: DEX2917841 19790503
- 主分类号: C23C14/24
- IPC分类号: C23C14/24 ; C23C14/30 ; C23C13/12
摘要:
A vaporizer for vacuum deposition installations has at least one crucible and a plurality of crucible-receiving recesses movable into a vaporizing position, a vapor-conducting device and a shutter for interrupting the flow of vapor. The vaporizer is capable of enabling a plurality of different substances to be vaporized in succession without mutual contamination by providing the vapor-conducting device wherein the device has a plurality of vapor screens which can be individually set down at the edges of the crucible-receiving recesses by relative movement between the vapor-conducting device and the crucible. The shutters have a plurality of lobes which can be individually moved over the particular vapor screen located in the vaporizing position. The drives associated with the vapor-conducting device and shutter are interconnected such that the same vapor screen and the same shutter lobe are always associated with a particular crucible-receiving recess.
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