发明授权
US4445108A Piezoresistive transducers employing the spreading resistance effect 失效
采用扩散电阻效应的压阻传感器

Piezoresistive transducers employing the spreading resistance effect
摘要:
There is disclosed a spreading resistance piezoresistive transducer which employs a planar diaphragm member fabricated from a semiconductor material and having deposited on a surface thereof at least three contact areas. A first contact area is located central to the diaphragm with a second area near the periphery of the diaphragm. A third contact is of a larger area and is positioned between the first and second contacts. A source of biasing potential is applied between the first and second contacts to cause current flow indicative of the spreading resistance between the contacts. The value of the spreading resistance varies in accordance with a force applied to the diaphragm.
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