发明授权
- 专利标题: Shot arranging method in a divisional printing apparatus
- 专利标题(中): 分割印刷装置中的拍摄布置方法
-
申请号: US449825申请日: 1982-12-14
-
公开(公告)号: US4488806A公开(公告)日: 1984-12-18
- 发明人: Kazuo Takahashi , Hiroshi Sato , Masao Kosugi
- 申请人: Kazuo Takahashi , Hiroshi Sato , Masao Kosugi
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX56-207679 19811221
- 主分类号: H01L21/30
- IPC分类号: H01L21/30 ; B41J2/44 ; G03F7/20 ; H01L21/027 ; H01L27/02 ; G03B27/32 ; G03B27/44
摘要:
In a divisional printing apparatus wherein the pattern of a mask is reduced and projected for printing onto a wafer and the mask and the wafer are moved relative to each other at each shot so that the exposed areas thereof do not overlap each other, and whereby the same pattern as that for collective printing is printed onto the effective area of the wafer by a plurality of shots, a shot arranging method in which, in the case of a so-called multichip shot in which a plurality of chips are exposed at a time at each shot, the special chip area of the wafer is not exposed, but the wafer is effectively exposed so that the creation of unusable chips is minimized.
公开/授权文献
- US6136447A Fluororesin-covered fixing rolls 公开/授权日:2000-10-24
信息查询
IPC分类: