发明授权
US4504339A Method for producing multilayered glass-ceramic structure with
copper-based conductors therein
失效
用于制造其中具有铜基导体的多层玻璃 - 陶瓷结构的方法
- 专利标题: Method for producing multilayered glass-ceramic structure with copper-based conductors therein
- 专利标题(中): 用于制造其中具有铜基导体的多层玻璃 - 陶瓷结构的方法
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申请号: US502598申请日: 1983-06-09
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公开(公告)号: US4504339A公开(公告)日: 1985-03-12
- 发明人: Nobuo Kamehara , Kazuaki Kurihara , Koichi Niwa
- 申请人: Nobuo Kamehara , Kazuaki Kurihara , Koichi Niwa
- 申请人地址: JPX Kawasaki
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX57-101990 19820616
- 主分类号: H05K3/46
- IPC分类号: H05K3/46 ; B32B15/04 ; H01L21/48 ; H01L23/15 ; H01L23/498 ; H05K1/03 ; H05K3/16 ; C03B29/00 ; C04B33/34 ; C04B37/00
摘要:
A method for producing a multilayered glass-ceramic structure with copper-based conductors therein, includes firing a multilayered structure, in which copper-based patterns and glass-ceramic layers are alternately laminated, in an inert atmosphere containing water vapor, the partial pressure of which is from 0.005 to 0.3 atmosphere. The temperature multilayered structure is fired at a temperature at which a thermally depolymerizable resin binder, contained in the glass-ceramic green sheets, is depolymerized and eliminated, but its glass components and the copper exhibit substantially no change in their state. The method also includes raising, in an inert atmosphere without water vapor, the firing temperature at which particles of the glass components coalesce, but the metallic state of copper is not affected.
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