发明授权
US4535234A Light exposure apparatus with cooling means 失效
具有冷却装置的曝光装置

Light exposure apparatus with cooling means
摘要:
Light exposure apparatus comprises a light source, a spectral filter perivious to light of a prescribed wavelength range, a glass member whose cut-off frequency in the prescribed wavelength range is variable with temperature, and a temperature control for controlling the temperature of the glass member. Intensity of the light from the light source, passing through the spectral filter and glass member, and impinging upon the surface subject to light-exposure is controlled by the temperature control.
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