发明授权
- 专利标题: Negative image forming process in o-quinone diazide layer utilizing laser beam
- 专利标题(中): 利用激光束在邻醌二叠层中的负成像过程
-
申请号: US548132申请日: 1983-11-03
-
公开(公告)号: US4544627A公开(公告)日: 1985-10-01
- 发明人: Yonosuke Takahashi , Hiromichi Tachikawa , Fumiaki Shinozaki , Tomoaki Ikeda
- 申请人: Yonosuke Takahashi , Hiromichi Tachikawa , Fumiaki Shinozaki , Tomoaki Ikeda
- 申请人地址: JPX
- 专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人地址: JPX
- 优先权: JPX53-134270 19781031
- 主分类号: G03C1/72
- IPC分类号: G03C1/72 ; G03C5/00 ; G03C5/16 ; G03C5/56 ; G03F7/022 ; G03F7/20 ; H01L21/027 ; G03F7/26
摘要:
A negative-working image forming process which comprises uniformly exposing a photosensitive material comprising a support having thereon a sensitive layer comprising (i) an o-quinonediazide compound and (ii) a second compound, to actinic radiation which is able to convert the o-quinonediazide compound to the corresponding indenecarboxylic acid compound, and subsequent to said uniformly exposing imagewise exposing said exposed photosensitive material to a laser beam to thereby render the indenecarboxylic acid compound of the imagewise exposed areas convert to the corresponding indene compound and developing with an alkaline developing solution to dissolve out the unexposed area to the laser beam, wherein said second compound reduces the rate of dissolution of the laser exposed areas in the developing solution by converting the indenecarboxylic acid to the corresponding indene compound, whereby said image results.
公开/授权文献
信息查询