发明授权
- 专利标题: Horizontal position detecting device
- 专利标题(中): 水平位置检测装置
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申请号: US419514申请日: 1982-09-17
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公开(公告)号: US4558949A公开(公告)日: 1985-12-17
- 发明人: Makoto Uehara , Takeshi Sudo , Fujio Kanatani
- 申请人: Makoto Uehara , Takeshi Sudo , Fujio Kanatani
- 申请人地址: JPX Tokyo
- 专利权人: Nippon Kogaku KK
- 当前专利权人: Nippon Kogaku KK
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX56-211130 19811226
- 主分类号: G01B11/26
- IPC分类号: G01B11/26 ; G03F9/00 ; H01L21/027 ; H01L21/30 ; G01C1/00
摘要:
Disclosed is a horizontal position detecting device for maintaining the surface of a body to be inspected vertically to the optical axis of a main objective lens. The device includes an illumination optical system and a condenser lens system. The illumination optical system supplies parallel light rays to the surface of the body from the direction oblique to the optical axis of the objective lens. The condenser lens system condenses the light rays supplied by the illumination optical system and reflected by the surface of the body. The optical axes of the illumination optical system and the condenser lens system are arranged substantially symmetrically with respect to the axis of the objective lens.
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