发明授权
- 专利标题： Gas supplying apparatus
- 专利标题（中）： 供气装置
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申请号： US677588申请日： 1984-12-03
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公开(公告)号： US4563312A公开(公告)日： 1986-01-07
- 发明人: Hiroaki Takimoto , Tetsuo Miyajiri , Kiminobu Yoshida , Tamio Turita
- 申请人： Hiroaki Takimoto , Tetsuo Miyajiri , Kiminobu Yoshida , Tamio Turita
- 申请人地址： JPX Osaka
- 专利权人： Sumitomo Electric Industries, Ltd.
- 当前专利权人： Sumitomo Electric Industries, Ltd.
- 当前专利权人地址： JPX Osaka
- 优先权： JPX58-226750 19831202
- 主分类号： C03B8/04
- IPC分类号： C03B8/04 ; B01J4/00 ; C03B20/00 ; C03B37/014 ; C03B37/018 ; C03B37/085 ; C03C17/02 ; C23C16/448 ; G02B6/00 ; B01F3/04
摘要：
A gas supply apparatus for supplying gaseous raw material of an article to a processing apparatus, including at least one main vessel for storing liquid raw material of the article and supplying the gaseous raw material to the processing apparatus, an auxiliary vessel for storing liquid raw material replenishment for the liquid raw material, a main pipe for delivering the liquid raw material replenishment to the main vessel, a return pipe branched form the main pipe, first and second control valves, and a feed device for feeding, through the main pipe, the liquid raw material replenishment to the main vessel.
公开/授权文献
- US4068956A Pulsed laser densitometer system 公开/授权日：1978-01-17
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