Novel fluorinated thiocarbonic acid ester-fluorides of the formula ##STR1## in which R.sup.1 represents alkyl, cycloalkyl or optionally substituted aryl andR.sup.2 and R.sup.3 independently of one another represent hydrogen or alkyl, orR.sup.1 and R.sup.2 together represent an alkylene chain,a new process for the preparation of the new compounds and their use as intermediates for the preparation of compounds having herbicidal properties.Novel intermediates of the formulae ##STR2## in which R.sup.2 and R.sup.3 have the above-mentioned meaning,R.sup.4 is optionally substituted aryl,R.sup.5 is alkyl or cycloalkyl, andX is fluorine or chlorine, at least one X representing chlorine.