Invention Grant
- Patent Title: Ion-beam monitor
- Patent Title (中): 离子束监视器
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Application No.: US619760Application Date: 1984-06-12
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Publication No.: US4570070APublication Date: 1986-02-11
- Inventor: Masatoshi Tabei
- Applicant: Masatoshi Tabei
- Applicant Address: JPX Kanagawa
- Assignee: Fuji Photo Film Co., Ltd.
- Current Assignee: Fuji Photo Film Co., Ltd.
- Current Assignee Address: JPX Kanagawa
- Main IPC: G01T1/29
- IPC: G01T1/29 ; H01J37/30 ; G01N23/22
Abstract:
The ion-beam monitor determines the distribution of the ion beam intensity by scanning a flat pellet of Al.sub.2 O.sub.3 with the ion beam and detecting the ultra violet radiation emitted from the Al.sub.2 O.sub.3 pellet and recording the same at each step of the scanning operation.
Public/Granted literature
- US5781592A Selective diversity system Public/Granted day:1998-07-14
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