发明授权
- 专利标题: Charged particle energy spectrometer
- 专利标题(中): 带电粒子能谱仪
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申请号: US641203申请日: 1984-08-16
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公开(公告)号: US4593196A公开(公告)日: 1986-06-03
- 发明人: Kenneth Yates
- 申请人: Kenneth Yates
- 申请人地址: GBX Crawley
- 专利权人: Vg Instruments Group Limited
- 当前专利权人: Vg Instruments Group Limited
- 当前专利权人地址: GBX Crawley
- 优先权: GBX8322017 19830816
- 主分类号: H01J49/44
- IPC分类号: H01J49/44 ; H01J49/02 ; H01J49/48 ; H01J40/00
摘要:
A charged particle energy spectrometer, typically an electron spectrometer, comprising an electrostatic dispersive charged particle analyzer, e.g. a substantially hemispherical sector analyzer (1,6), and a detector means comprising a plurality of charged particle detectors (26-28) is described. Fringing fields at the exit of the analyzer are corrected by a fringing field corrector plate (7) containing a plurality of apertures (20, 22, 23) each aligned with one channel of the detector means. Exit beam defining slits (21, 24, 25) in a plate (12) situated in the exit focal plane of the analyzer may optionally be provided. Each aperture (20, 22, 23) is preferably the same size and shape as the single aperture used to achieve optimum correction of the fringing fields in a conventional spectrometer having a single channel detector. One or more position sensitive detectors may be used in place of some or all of the detectors (26-28).
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